However, high-density domain boundaries are present in the CVD graphene. Large-Domain Graphene Growth on Cu by Oxygen-Assisted CVDĬatalytic growth of graphene on Cu substrates via the CVD process is the most promising and economic method to enable industrial-scale production of graphene. The manuscript regarding these results are in preparation for submission. I examined the catalytic ability of three nickel silicides, and our results show that Ni 2Si exhibits the highest catalytic ability over other nickel silicide substrates, paving the way for direct growth of graphene on contact materials. It is equipped with two home-made evaporators (Ni, C), a rate monitor, rapid thermal annealing system, and a specialized sample holder, which is a delicate design. To avoid surface oxidation of silicides, I spent one year to build an unique Ultra-High Vacuum Chemical Vapor Deposition (UHVCVD) system. Therefore, to further integrate graphene into Si-based energy-saving transistors, we proposed to directly synthesize graphene on nickel silicides (Ni 2Si, NiSi, and NiSi 2), which are the common contact materials in VLSI technology. However, it requires high growth temperature (1000℃) and complicated transferring process to fabricate grahene-based devices. The routine method for graphene growth is the CVD process with Cu substrates. For almost ten years, the synthesis of large-area high-quality graphene has been an important but unsolved problem. Graphene has been in the focus of intensive researches due to its unique physical properties. High-Quality Graphene Growth on Nickel Silicide Substrates by UHVCVD I've also employed as a TEM teaching assistant for 2 years by the Department of Materials Science and Engineering at NTU.
I designed and built this Ultra-High Vacuum CVD system from scratch to fabricate nickel silicides (Ni 2Si, NiSi, NiSi 2) on Si substrates without surface oxidation for graphene growth. in Materials Science and Engineering, NTU, 2014Įxpertises Ultra-High Vacuum Techniques, TEM analysis, and Growth of Nanomaterials in Materials Science and Engineering, NTU, 2016ī.S.E.
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